Pütz, P: Fabrication of Superconductor-Insulator-Superconduc
Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.
In this work an enhanced fabrication...
In this work an enhanced fabrication...
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Superconductor-Insulator-Superconductor (SIS) junction devices are used as state of the art frequency mixers for radio astronomical heterodyne receivers and enable near quantum limited sensitivity up to about 1 THz.In this work an enhanced fabrication scheme for SIS junction devices has been developed and implemented into regular device fabrication at KOSMA. Electron beam lithography in combination with a chemical mechanical planarization (CMP) process has considerably improved submicron junction area reproducibility and electrical device characteristics. The fabrication scheme demonstrates enough development potential for future THz frequency SIS mixer designs.
Bibliographische Angaben
- Autor: Patrick Pütz
- 148 Seiten, Maße: 14,8 x 21,1 cm, Kartoniert (TB), Deutsch
- Verlag: Cuvillier Verlag
- ISBN-10: 3865370934
- ISBN-13: 9783865370938
- Erscheinungsdatum: 09.06.2004
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