CMOS Hotplate Chemical Microsensors / Microtechnology and MEMS (PDF)

Henry Baltes: Professor of Physical Electronics at ETH Zurich and the Director of the Physical Electronics Laboratory (PEL) since 1988. As of June 1, 2004 he is on leave in order to act as Chairman of the ETH Zurich Center of Biosystems Science and Engineering to be located at Basel. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. He is a co-founder of the spin-off company SENSIRION. He is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation in 1998, the Wilhelm Exner Medal of the Austrian Trade Association in 1999, the degree of Doctor of Engineering (honoris causa) of the University of Waterloo in 2000, and Doctor of Electronic Engineering (ad honorem) of the Alma Mater Studiorum University of Bologna in 2003. He joined the Proceedings of the IEEE in 2004. In 1996 he was Visiting Professor at Stanford University and the University of Waterloo. In 2002/03 he was Visiting Scientist at the Ritsumeikan University, the University of Bologna, and the University of Freiburg, Germany. He is a member of the Scientific Council of the Institute for Microelectronics and Microsystems (IMM) of the Italian National Research Council. He also is a member of the International Scientific Committee of the Advanced Research Center on Electronic Systems (ARCES) of the University of Bologna. He is co-editor of the Wiley-VCH book series SENSORS UPDATE and ADVANCED MICRO AND NANOSYSTEMS as well as the Springer book series MICROTECHNOLOGY AND MEMS. From 1991 to 1995 he was the program director of the Swiss Priority Program LESIT. Prior to 1988, he held the Henry Marshall Tory Chair at the University of Alberta, where he was Acting President of the Alberta Microelectronics Centre and a co-founder and Director of LSI Logic Corporation of Canada. From 1974 to 1982 he worked for Landis & Gyr Zug (now Siemens) Switzerland, where he directed the solid-state device laboratory. He received the D. Sc. degree from ETH Zurich in 1971.