Nanofabrication Handbook (PDF)
(Sprache: Englisch)
This comprehensive handbook presents a unique collection of new and important approaches to nanofabrication, from electron beam lithography, focused ion beam, and optical lithography to two-photon lithography, self assembly, and plasmonic nanolithography....
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This comprehensive handbook presents a unique collection of new and important approaches to nanofabrication, from electron beam lithography, focused ion beam, and optical lithography to two-photon lithography, self assembly, and plasmonic nanolithography. Contributors from leading research facilities and academic institutions offer hands-on instructions and examples and pave the way for future research. The practical information provided in the book gives readers a foundation to enter the complex world of nanofabrication and helps them to select the proper fabricating technique for their experiments.
Autoren-Porträt
Stefano Cabrini is director of the Nanofabrication Facility and member of the interfacility nanophotonics group and the "single digit nano fabrication" theme in the Molecular Foundry (a U.S. Department of Energy program) at the Lawrence Berkeley National Laboratory. His research interests include nanophotonics and metamaterials, semiconductor device fabrication, optical device fabrication, MEMS fabrication, and the development of new lithographic tools and processes.Satoshi Kawata is a professor of applied physics at Osaka University, chairman of Nanophoton Corp., and chief scientist of the Nanophotonics Laboratory at RIKEN. A fellow of the Optical Society of America, SPIE, and Institute of Physics, Dr. Kawata has been a recipient of the Medal of Purple Ribbon from the Japanese Emperor; the Science and Technology Award from the Japanese Ministry of Education, Culture, Sports, Science and Technology; the Da Vinci Award of Excellence from LMVH MöHennessy Louis Vuitton; and the Japan IBM Science Award. His research interests include nanophotonics, biophotonics, plasmonics, metamaterials, photonic crystals, and nanofabrication through two-photon absorption techniques.
Bibliographische Angaben
- 2012, 1. Auflage, 546 Seiten, Englisch
- Herausgegeben: Stefano Cabrini, Satoshi Kawata
- Verlag: Taylor & Francis
- ISBN-10: 1420090534
- ISBN-13: 9781420090536
- Erscheinungsdatum: 24.02.2012
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