Scaling Issues and Design of MEMS (PDF)

Preface. Introduction. 1. Scaling of MEMS. 1.1 Introduction to Scaling Issues. 1.2 Examples of Dimensional Scaling Potentials. 1.2.1 Scaling effects on a cantilever beam. 1.2.2 Scaling of electrostatic actuators. 1.2.3 Scaling of thermal actuators. 1.3 Motivation, Fabrication and Scaling of MEMS. 1.4 Scaling as a Methodological Approach. References. 2. Scaling of Microactuators - an Overview. 2.1 Electrostatic Actuators. 2.1.1 Transverse combs modelling. 2.1.2 Lateral combs modelling. 2.2 Magnetic Transducers. 2.2.1 Magnetic actuators. 2.2.2 Ferromagnetic transducers. 2.3 Thermal Actuators. 2.3.1 Thermomechanical actuators. Acknowledgements. References. 3. Scaling of Thermal Sensors. 3.1 Thermoelectric Sensors. 3.2 Application: Dew-Point Relative Humidity Sensors. 3.2.1 Device structures and operating principles. 3.2.2 Device modelling and simulations. 3.2.3 Device design. 3.3 Conclusions. Acknowledgements. References. 4. Inductive Sensors for Magnetic Fields. 4.1 Inductive Microsensors for Magnetic Particles. 4.1.1 Integrated inductive sensors. 4.1.2 Planar differential transformer. 4.1.3 Signal-conditioning circuits. 4.1.4 Simulation of the planar differential transformer. 4.1.5 Experimental results. 4.2 Magnetic Immunoassay Systems. Acknowledgements. References. 5. Scaling of Mechanical Sensors. 5.1 Introduction. 5.2 Device Modelling and Fabrication Processes. 5.2.1 Fabrication processes. 5.2.2 Devices modelling. 5.2.3 Accelerometers. 5.2.4 Resonant mass sensors. 5.3 Experimental Device Prototypes. 5.3.1 CMOS devices. 5.3.2 SOI devices. 5.3.3 Finite element modelling. 5.4 Scaling Issues on Microaccelerometers and Mass Sensors. 5.5 Some Experimental Results. 5.6 Vibrating Microgyroscopes. 5.6.1 Coupled vibratory gyroscopes. Acknowledgements. References. 6. Scaling of Energy Sources. 6.1 Introduction. 6.2 Energy Supply Strategies for Autonomous Microsystems. 6.2.1 Use of microlenses in photothermomechanical actuation. 6.2.2 Technologies, materials and design of

Salvatore Baglio, Associate Professor of Electronic
Instrumentations and Measurements, University of Catania,
Italy. Salvatore Baglio has co-authored over 150 scientific
publications and his research interests include nonlinear and
chaotic dynamical systems, smart sensors, microsensors and
Microsystems.

Salvatore Castorina, Electrical and Electronic
Measurements Group, University of Catania. Salvatore
Castorina is co-author of over 20 scientific papers and his
research interests include micro and nano electromechanical
systems, magnetic and thermal, micro sensors and micro actuators,
micro and nano robotics.

Luigi Fortuna, Professor of System Theory, University of
Catania. Luigi Fortuna has published more than 280 technical
papers and his interests include nonlinear science and complexity,
chaos and cellular neural networks.

NicolòSavalli, Engineering Faculty,
University of Catania. Nicolò Savalli teaches courses in
Measurement Theory and Measurement Applications and is co-author of
more than 35 scientific publications. His research interests
include micro-electro-mechanical-systems (MEMS) and
micro-opto-electro-mechanical-systems (MOEMS).

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