Principles of Microelectromechanical Systems / Wiley - IEEE Bd.1 (PDF)

The building blocks of MEMS design through closed-form
solutions

Microelectromechanical Systems, or MEMS, is the technology of
very small systems; it is found in everything from inkjet printers
and cars to cell phones, digital cameras, and medical equipment.
This book describes the principles of MEMS via a unified approach
and closed-form solutions to micromechanical problems, which have
been recently developed by the author and go beyond what is
available in other texts. The closed-form solutions allow the
reader to easily understand the linear and nonlinear behaviors of
MEMS and their design applications.

Beginning with an overview of MEMS, the opening chapter also
presents dimensional analysis that provides basic dimensionless
parameters existing in large- and small-scale worlds. The book then
explains microfabrication, which presents knowledge on the common
fabrication process to design realistic MEMS. From there, coverage
includes:

* Statics/force and moment acting on mechanical structures in
static equilibrium

* Static behaviors of structures consisting of mechanical
elements

* Dynamic responses of the mechanical structures by the solving of
linear as well as nonlinear governing equations

* Fluid flow in MEMS and the evaluation of damping force acting on
the moving structures

* Basic equations of electromagnetics that govern the electrical
behavior of MEMS

* Combining the MEMS building blocks to form actuators and sensors
for a specific purpose

All chapters from first to last use a unified approach in which
equations in previous chapters are used in the derivations of
closed-form solutions in later chapters. This helps readers to
easily understand the problems to be solved and the derived
solutions. In addition, theoretical models for the elements and
systems in the later chapters are provided, and solutions for the
static and dynamic responses are obtained in closed-forms.

This book is designed for senior or graduate students in
electrical and mechanical engineering, researchers in MEMS, and
engineers from industry. It is ideal for radio
frequency/electronics/sensor specialists who, for design purposes,
would like to forego numerical nonlinear mechanical simulations.
The closed-form solution approach will also appeal to device
designers interested in performing large-scale parametric
analysis.