Silicon Semiconductor Technology (PDF)

Name: Silicon Semiconductor Technology
Brand: Springer Fachmedien Wiesbaden
SKU: 149596428
Price: 71.49 EUR
Availability: OnlineOnly

Processing and Integration of Microelectronic Devices (Sprache: Englisch)

Autor: Ulrich Hilleringmann

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Silicon Semiconductor Technology, Ulrich Hilleringmann

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The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.

The Content

Wafer fabrication
Thermal oxidation
Lithography
Etching technology
Doping techniques
Chemical and Physical Deposition
Metallization and Contacts

About the Author

Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989

Autoren-Porträt von Ulrich Hilleringmann

About the AuthorProf. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989.